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高纯气体的纯度最高可以达到多少?

高纯气体在不同的工艺中应用广泛。高纯气体的纯度对过程、结果都有直接的影响。根据技术水平的高低,能够生产出来的高纯气体纯度也层次不齐。以法液空为例,纯度最高可达99.99995%。

氮气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

N2

99.9995%

O2<1ppm --1ppm--="">

H2<0.5 ppm="" --0="" 5--="">

CO<0.5ppm

CO2<0.5ppm

THC<0.1ppm --0="" 1ppm--="">

H2O<2ppm

ALPHAGAZ?2

N2

99.9999%

O2<100 ppb="" no2="" 20ppb="" p="">

H2<50 ppb="" n2o="" 20ppb="" p="">

CO<50 ppb="" so2="" 20="" p="">

CO2<50ppb h2s="" 20ppb="" p="">

THC<50 ppb="" nh3="" 20ppb="" p="">

CH4<50 ppb="" h2o="" 400ppb="" p="">

NO<20 ppb="" p="">

Research?Grade

N2

99.99995%

O2<50 ppb="" no2="" 10ppb="" p="">

H2<20 ppb="" n2o="" 10ppb="" p="">

CO<30 ppb="" so2="" 10="" p="">

CO2<30ppb h2s="" 10ppb="" p="">

THC<30 ppb="" nh3="" 10ppb="" p="">

CH4<30 ppb="" h2o="" 200ppb="" p="">

?NO<10 ppb="" p="">

Particles<0.1μm(30parts/ft3)

?

氢气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

H2

99.9995%

N2<2ppm

O2+Ar<1ppm --1ppm--="">

CO<0.5ppm

CO2<0.5ppm

THC<0.1ppm

H2O<2ppm

ALPHAGAZ?2

H2



99.9999%

O2<100 ppb="" no2="" 20ppb="" p="">

N2<400 ppb="" n2o="" 20ppb="" p="">

CO<50ppb so2="" 20ppb="" p="">

CO2<50 ppb="" h2s="" 20ppb="" p="">

THC<50 ppb="" nh3="" 20="" p="">

CH4<50 ppb="" h20="" 400="" p="">

NO<20ppb

Research?Grade

H2



99.99995%

O2<50 ppb="" no2="" 10ppb="" p="">

N2<200 ppb="" n2o="" 10ppb="" p="">

CO<30 ppb="" so2="" 10="" p="">

CO2<30ppb h2s="" 10ppb="" p="">

THC<30 ppb="" nh3="" 10ppb="" p="">

CH4<30 ppb="" h2o="" 200ppb="" p="">

?NO<10 ppb="" p="">

Particles<0.1μm(30parts/ft3)

?

氩气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

Ar

99.9995%

N2<2ppm

O2<1ppm

H2<0.5ppm

CO<0.3ppm

CO2<0.3ppm

THC<0.1ppm

H2O<2ppm

ALPHAGAZ?2

Ar




99.9999%

O2<100ppb no="" 20ppb="" p="">

H2<50ppb no2="" 20ppb="" p="">

CO<50ppb n2o="" 20ppb="" p="">

CO2<50ppb so2="" 20ppb="" p="">

THC<50ppb h2s="" 20ppb="" p="">

CH4<50ppb nh3="" 20ppb="" p="">

H2O<400ppb p="">

Research?Grade

Ar




99.99995%

O2<50 ppb="" no2="" 10ppb="" span="">

H2<20ppb n2o="" 10ppb="" span="">

CO<30 ppb="" so2="" 10="" span="">

CO2<30ppb h2s="" 10ppb="" span="">

THC<30 ppb="" nh3="" 10ppb="" span="">

CH4<30 ppb="" h2o="" 200ppb="" span="">

?NO<10 ppb="" span="">

Particles<0.1μm(30parts/ft3)

?

氧气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

O2

99.9995%

N2<2ppm

Ar<2ppm --2ppm--="">

H2<0.5 ppm="" --0="" 5--="">

CO<0.5ppm

CO2<0.5ppm

THC<0.1ppm

H2O<2ppm

ALPHAGAZ?2

O2





99.9999%

N2<100ppb no="" 20ppb="" p="">

Ar<200ppb no2="" 20ppb="" p="">

H2<50ppb n2o="" 20ppb="" p="">

CO<50ppb so2="" 20ppb="" p="">

CO2<50ppb h2s="" 20ppb="" p="">

THC<50ppb nh3="" 20ppb="" p="">

CH4<50 ppb="" h2o="" 400ppb="" p="">

Research?Grade

O2




99.99995%

N2<200 ppb="" no="" 10="" span="">

Ar<200 ppb="" no2="" 10ppb="" span="">

H2<20ppb n2o="" 10ppb="" span="">

CO<30 ppb="" so2="" 10="" span="">

CO2<30ppb h2s="" 10ppb="" span="">

THC<30 ppb="" nh3="" 10ppb="" span="">

CH4<30 ppb="" span="">

H2O<200ppb

Particles<0.1μm(30parts/ft3)

?

氦气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

He

99.9995%

Ne<4ppm

N2<2ppm

O2+Ar<1ppm

H2<0.5ppm

CO<0.5ppm

CO2<0.5ppm

THC<0.1ppm

H2O<2ppm

ALPHAGAZ?2

He




99.9999%

N2<100 ppb="" no2="" 20ppb="" p="">

H2<50 ppb="" n2o="" 20ppb="" p="">

O2+Ar<100 ppb="" so2="" 20="" p="">

CO<50 ppb="" h2s="" 20ppb="" p="">

CO2<50ppb nh3="" 20ppb="" p="">

THC<50 ppb="" no="" 20="" p="">

CH4<50 ppb="" h2o="" 400ppb="" p="">

NO<20 ppb="" p="">

Research?Grade

He




99.99995%

N2<100 ppb="" no="" 10="" p="">

H2<20ppb no2="" 10ppb="" p="">

O2+Ar<50ppb n2o="" 10ppb="" p="">

CO<30 ppb="" so2="" 10="" p="">

CO2<30ppb h2s="" 10ppb="" p="">

THC<30 ppb="" nh3="" 10ppb="" p="">

CH4<30 ppb="" p="">

H2O<200ppb

Particles<0.1μm(30parts/ft3)

?

空气

等级

纯度

杂质含量(体积分数)

ALPHAGAZ?1

Air

O2?20.5%?+/-?0.5%?abs

N2?Balance??

O2+N2?≥99.9995%

CO<0.5ppm

CO2<0.5ppm

THC<0.1ppm --0="" 1ppm--="">

H2O<2ppm

ALPHAGAZ?2

Air





O2?20.5%?+/-?0.5%?abs

N2?Balance??

O2+N2?≥99.9999%

H2<50ppb no2="" 20ppb="" p="">

CO<50ppb n2o="" 20ppb="" p="">

CO2<50ppb so2="" 20ppb="" p="">

THC<50ppb h2s="" 20ppb="" p="">

CH4<50ppb nh3="" 20ppb="" p="">

NO<20ppb h2o="" 400ppb="" p="">

Research?Grade

Air





O2?20.5%?+/-?0.5%?abs

N2?Balance??

O2+N2?≥99.99995%

H2<20ppb no="" 10="" ppb="" p="">

CO<30 ppb="" no2="" 10ppb="" span="">

CO2<30ppb n2o="" 10ppb="" span="">

THC<30 ppb="" so2="" 10="" span="">

CH4<30 ppb="" h2s="" 10ppb="" span="">

H2O<200ppb nh3="" 10ppb="" span="">

Particles<0.1μm(30parts/ft3)








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